Author Affiliations
Abstract
1 Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
In this letter, an enhancement-mode (E-mode) GaN p-channel field-effect transistor (p-FET) with a high current density of ?4.9 mA/mm based on a O3-Al2O3/HfO2 (5/15 nm) stacked gate dielectric was demonstrated on a p++-GaN/p-GaN/AlN/AlGaN/AlN/GaN/Si heterostructure. Attributed to the p++-GaN capping layer, a good linear ohmic I?V characteristic featuring a low-contact resistivity (ρc) of 1.34 × 10?4 Ω·cm2 was obtained. High gate leakage associated with the HfO2 high-k gate dielectric was effectively blocked by the 5-nm O3-Al2O3 insertion layer grown by atomic layer deposition, contributing to a high ION/IOFF ratio of 6 × 106 and a remarkably reduced subthreshold swing (SS) in the fabricated p-FETs. The proposed structure is compelling for energy-efficient GaN complementary logic (CL) circuits.
GaN p-FETs enhancement-mode HfO2 subthreshold swing Journal of Semiconductors
2023, 44(10): 102801
1 深圳技术大学中德智能制造学院,广东 深圳 518118
2 深圳技术大学大数据与互联网学院,广东 深圳 518118
研究了频谱受调制的修正圆Airy光束(MCAB)在单轴晶体中沿光轴的传播特性。与其他光束一样,左旋圆偏振(LHCP)的MCAB沿单轴晶体光轴传播时会激发拓扑电荷数为2的涡旋右旋圆偏振(RHCP)分量。MCAB在晶体传播时,LHCP分量和RHCP分量都会出现“突然自聚焦效应”,不带涡旋的LHCP分量在焦点附近形成实心光束,而RHCP分量由于具有涡旋相位而在焦点附近形成空心光束。单轴晶体的各向异性导致LHCP分量比涡旋RHCP分量更早出现最大光强。选择合适的频谱调制参数,MCAB的“突然自聚焦效应”强度约为普通圆Airy光束(CAB)的3.4倍;在晶体长度为10 cm的情况下,不带涡旋的LHCP分量转化为涡旋RHCP分量的效率可达43.28%,比普通CAB高约10%。
物理光学 光束传播 突然自聚焦 涡旋光束 单轴晶体
Author Affiliations
Abstract
1 Key Laboratory of Nano-Devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
2 University of Science and Technology Beijing, Beijing 100083, China
3 Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Nanchang 330200, China
4 School of Nano Technology and Nano Bionics, University of Science and Technology of China, Hefei 230026, China
5 e-mail: mxfeng2011@sinano.ac.cn
6 e-mail: qsun2011@sinano.ac.cn
This work reports a demonstration of electrically injected GaN-based near-ultraviolet microdisk laser diodes with a lasing wavelength of 386.3?nm at room temperature. The crack-free laser structure was epitaxially grown on Si substrates using an Al-composed down-graded AlN/AlGaN multilayer buffer to mitigate the mismatches in the lattice constant and coefficient of thermal expansion, and processed into “sandwich-like” microdisk structures with a radius of 12?μm. Air-bridge electrodes were successfully fabricated to enable the device electrical characterization. The electrically pumped lasing of the as-fabricated microdisk laser diodes was evidenced by the rapid narrowing down of electroluminescence spectra and dramatic increase in the light output power, as the current exceeded the threshold of 248?mA.
Photonics Research
2019, 7(6): 06000B32